Institut des
NanoSciences de Paris
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Caracterization zone

© INSP - L. Becerra {JPEG}
  • Scanning electron microscope (Zeiss Supra 40)
    This system allows the observation at big scale (up to the nanometer scale) of samples. Available detectors : SE2 and SE IN-LENS.
© INSP - L. Becerra {JPEG}
  • Optical microscope (Olympus BX51)
    Interchangeable objectives microscope (x5, x10, x20, x50 and x100). Various solutions offered to illuminate the sample and possibility of working under crossed polarizers.
© INSP - L. Becerra {JPEG}
  • Mechanical profilometer (Dektak 150 Veeco)
    Allows to measure exactly walking(steps), average roughness or still to realize a 3D map of the surface of a sample. Two styli(stylets) of measure are available (2,5 µm and 12,5 µm of radius of curvature of the point(headland)).
© INSP - L. Becerra {JPEG}
  • Micro Diamond Scriber (OEG MR100)
    A scriber is a device for cutting in an extremely located and accurate way a sample of silicon, glass or ceramic (maximum thickness ≈ 10mm). The sample is maintained fixed to a suitable chuck, equipped with fine tunings (the whole placed under microscope) allowing to define with a high precision the cutting area. The cut is then made by means of a diamond point. The accuracy of such an equipment is of 10µm, 0.006 °.
© INSP - L. Becerra {JPEG}
  • Chemical hoods for wet etchings and various manipulations
    A sorbonne and two laminar flow hoods are available. Hotplates and an ultrasonic agitator equip these work plans.